DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 이원종 | - |
dc.contributor.advisor | Lee, Won-Jong | - |
dc.contributor.author | 정성웅 | - |
dc.contributor.author | Chung, Sung-Woong | - |
dc.date.accessioned | 2011-12-15T01:43:05Z | - |
dc.date.available | 2011-12-15T01:43:05Z | - |
dc.date.issued | 1992 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60427&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/51403 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iv], 59 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | ECR 플라즈마 화학 증착법에 의해 증착된 aluminum oxide 박막의 특성에 관한 연구 | - |
dc.title.alternative | A study on the properties of the aluminum oxide thin film deposited by ECR plasma CVD | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 60427/325007 | - |
dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
dc.identifier.uid | 000901487 | - |
dc.contributor.localauthor | 이원종 | - |
dc.contributor.localauthor | Lee, Won-Jong | - |
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