Aluminium oxide 박막의 reactive ion etching 특성A study on the reactive ion etching properties of aluminium oxide thin films
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1992
- Identifier
- 60417/325007 / 000901104
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iii], 64 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.