Off-axis RF magnetron sputtering법에 의한 $YBa_2Cu_3O_x$ 박막의 제조 및 특성에 관한 연구Fabrication and characterization of superconducting $YBa_2Cu_3O_x$ thin films deposited by off-axis RF magnetron sputtering system
- Advisors
- 윤덕용; Yoon, Duk-Yong
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1992
- Identifier
- 60414/325007 / 000901144
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1992.2, [ v, 60 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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