Off-axis RF magnetron sputtering법에 의한 $YBa_2Cu_3O_x$ 박막의 제조 및 특성에 관한 연구Fabrication and characterization of superconducting $YBa_2Cu_3O_x$ thin films deposited by off-axis RF magnetron sputtering system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 윤덕용 | - |
| dc.contributor.advisor | Yoon, Duk-Yong | - |
| dc.contributor.author | 김현우 | - |
| dc.contributor.author | Kim, Hyun-Woo | - |
| dc.date.accessioned | 2011-12-15T01:42:53Z | - |
| dc.date.available | 2011-12-15T01:42:53Z | - |
| dc.date.issued | 1992 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60414&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51390 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1992.2, [ v, 60 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Off-axis RF magnetron sputtering법에 의한 $YBa_2Cu_3O_x$ 박막의 제조 및 특성에 관한 연구 | - |
| dc.title.alternative | Fabrication and characterization of superconducting $YBa_2Cu_3O_x$ thin films deposited by off-axis RF magnetron sputtering system | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 60414/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000901144 | - |
| dc.contributor.localauthor | 윤덕용 | - |
| dc.contributor.localauthor | Yoon, Duk-Yong | - |
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