WF6의 수소환원법에 의해 화학증착된 텅스텐 증착층의 증착기구 및 특성에 관한 연구A study on the deposition mechanism and characteristics of tungsten chemical vapor deposition using the hydrogen reduction ofWF6
- Advisors
- 남수우; Nam, Soo-Woo
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1989
- Identifier
- 67009/325007 / 000871269
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1989.2, [ [iv], 61 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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