WF6의 수소환원법에 의해 화학증착된 텅스텐 증착층의 증착기구 및 특성에 관한 연구A study on the deposition mechanism and characteristics of tungsten chemical vapor deposition using the hydrogen reduction ofWF6
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 남수우 | - |
| dc.contributor.advisor | Nam, Soo-Woo | - |
| dc.contributor.author | 윤수식 | - |
| dc.contributor.author | Yoon, Soo-Sik | - |
| dc.date.accessioned | 2011-12-15T01:39:06Z | - |
| dc.date.available | 2011-12-15T01:39:06Z | - |
| dc.date.issued | 1989 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67009&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51156 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1989.2, [ [iv], 61 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | WF6의 수소환원법에 의해 화학증착된 텅스텐 증착층의 증착기구 및 특성에 관한 연구 | - |
| dc.title.alternative | A study on the deposition mechanism and characteristics of tungsten chemical vapor deposition using the hydrogen reduction ofWF6 | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 67009/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000871269 | - |
| dc.contributor.localauthor | 남수우 | - |
| dc.contributor.localauthor | Nam, Soo-Woo | - |
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