반응성 스퍼터링법에 의한 $Pb(Zr,Ti)O_3$ 압전 박막의 제조 및 특성평가Preparation and characterization of $Pb(Zr,Ti)O_3$ piezoelectric thin films by reactive sputtering
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 166044/325007 / 000993769
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ ix, 85 p. ]
- Keywords
페롭스카이트; 스퍼터링; 잔류 응력; 압전; PZT; perovskite; sputtering; residual stress; piezoelectric
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.