반응성 스퍼터링법에 의한 $Pb(Zr,Ti)O_3$ 압전 박막의 제조 및 특성평가 = Preparation and characterization of $Pb(Zr,Ti)O_3$ piezoelectric thin films by reactive sputtering

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dc.contributor.advisor이원종-
dc.contributor.advisorLee, Won-Jong-
dc.contributor.author김혁환-
dc.contributor.authorKim, Hyuk-Hwan-
dc.date.accessioned2011-12-15T01:33:55Z-
dc.date.available2011-12-15T01:33:55Z-
dc.date.issued2001-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=166044&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50837-
dc.description학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ ix, 85 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject페롭스카이트-
dc.subject스퍼터링-
dc.subject잔류 응력-
dc.subject압전-
dc.subjectPZT-
dc.subjectperovskite-
dc.subjectsputtering-
dc.subjectresidual stress-
dc.subjectpiezoelectric-
dc.title반응성 스퍼터링법에 의한 $Pb(Zr,Ti)O_3$ 압전 박막의 제조 및 특성평가 = Preparation and characterization of $Pb(Zr,Ti)O_3$ piezoelectric thin films by reactive sputtering-
dc.typeThesis(Master)-
dc.identifier.CNRN166044/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000993769-
dc.contributor.localauthor이원종-
dc.contributor.localauthorLee, Won-Jong-
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