학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ 77 p. ]
전계효과 이동도; 다결정 실리콘 박막 트랜지스터; 유도결합 플라즈마; inductively coupled plasma (ICP); field effect mobility; effective charge density; poly-Si TFT
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