DC reactive magnetron sputtering 방법으로 증착된 MCM용 비정질 $Ta_2O_5$ 박막 커패시터에 관한 연구A study on the amorphous $Ta_2 O_5$ thin film capacitors deposited by DC reactive magnetron sputtering for MCM applications
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 백경욱 | - |
| dc.contributor.advisor | Paik, Kyung-Wook | - |
| dc.contributor.author | 조성동 | - |
| dc.contributor.author | Cho, Sung-Dong | - |
| dc.date.accessioned | 2011-12-15T01:32:23Z | - |
| dc.date.available | 2011-12-15T01:32:23Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150090&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50744 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ iv, 72 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 전기전도기구 | - |
| dc.subject | 반응성스퍼터링 | - |
| dc.subject | 산화탄탈륨 | - |
| dc.subject | 멀티칩모듈 | - |
| dc.subject | 비정질 | - |
| dc.subject | Amorphous | - |
| dc.subject | Conduction mechanism | - |
| dc.subject | Reactive sputtering | - |
| dc.subject | Tantalum oxide | - |
| dc.subject | MCM | - |
| dc.title | DC reactive magnetron sputtering 방법으로 증착된 MCM용 비정질 $Ta_2O_5$ 박막 커패시터에 관한 연구 | - |
| dc.title.alternative | A study on the amorphous $Ta_2 O_5$ thin film capacitors deposited by DC reactive magnetron sputtering for MCM applications | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 150090/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000973647 | - |
| dc.contributor.localauthor | 백경욱 | - |
| dc.contributor.localauthor | Paik, Kyung-Wook | - |
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- MS-Theses_Master(석사논문)
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