학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ iv, 72 p. ]
전기전도기구; 반응성스퍼터링; 산화탄탈륨; 멀티칩모듈; 비정질; Amorphous; Conduction mechanism; Reactive sputtering; Tantalum oxide; MCM
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.