ALD-TiN을 이용한 MOCVD Al박막의 표면 거칠기 개선에 관한 연구A study on the surface morphology improvement of MOCVD Al film using ALD-TiN
- Advisors
- 강상원researcher; Kang, Sang-Wonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 150085/325007 / 000973558
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ [71] p. ]
- Keywords
원자층단위증착법; 거칠기; 알루미늄; 유기금속화학증착법; 박막; Thin film; ALD; Morphology; Aluminum; MOCVD
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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