ALD-TiN을 이용한 MOCVD Al박막의 표면 거칠기 개선에 관한 연구A study on the surface morphology improvement of MOCVD Al film using ALD-TiN
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강상원 | - |
| dc.contributor.advisor | Kang, Sang-Won | - |
| dc.contributor.author | 이현배 | - |
| dc.contributor.author | Lee, Hyun-Bae | - |
| dc.date.accessioned | 2011-12-15T01:32:18Z | - |
| dc.date.available | 2011-12-15T01:32:18Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150085&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50739 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ [71] p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 원자층단위증착법 | - |
| dc.subject | 거칠기 | - |
| dc.subject | 알루미늄 | - |
| dc.subject | 유기금속화학증착법 | - |
| dc.subject | 박막 | - |
| dc.subject | Thin film | - |
| dc.subject | ALD | - |
| dc.subject | Morphology | - |
| dc.subject | Aluminum | - |
| dc.subject | MOCVD | - |
| dc.title | ALD-TiN을 이용한 MOCVD Al박막의 표면 거칠기 개선에 관한 연구 | - |
| dc.title.alternative | A study on the surface morphology improvement of MOCVD Al film using ALD-TiN | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 150085/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000973558 | - |
| dc.contributor.localauthor | 강상원 | - |
| dc.contributor.localauthor | Kang, Sang-Won | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.