스핀코팅법으로 금속을 흡착시킨 PECVD 비정질 실리콘 박막의 저온 결정화에 관한 연구A study on the low-temperatue crystallization of PECVD amorphous silicon thin films adsorbed from metal solution by spin coating
- Advisors
- 안병태researcher; Ahn, Byung-Taeresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 133543/325007 / 000963235
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ vi, 74 p. ]
- Keywords
흡착; 실리콘; 결정화; 고상결정화; SPC; Adsorption; Silicon; Crystallization
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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