스핀코팅법으로 금속을 흡착시킨 PECVD 비정질 실리콘 박막의 저온 결정화에 관한 연구A study on the low-temperatue crystallization of PECVD amorphous silicon thin films adsorbed from metal solution by spin coating
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 박상원 | - |
| dc.contributor.author | Park, Sang-Won | - |
| dc.date.accessioned | 2011-12-15T01:31:12Z | - |
| dc.date.available | 2011-12-15T01:31:12Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133543&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50673 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ vi, 74 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 흡착 | - |
| dc.subject | 실리콘 | - |
| dc.subject | 결정화 | - |
| dc.subject | 고상결정화 | - |
| dc.subject | SPC | - |
| dc.subject | Adsorption | - |
| dc.subject | Silicon | - |
| dc.subject | Crystallization | - |
| dc.title | 스핀코팅법으로 금속을 흡착시킨 PECVD 비정질 실리콘 박막의 저온 결정화에 관한 연구 | - |
| dc.title.alternative | A study on the low-temperatue crystallization of PECVD amorphous silicon thin films adsorbed from metal solution by spin coating | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 133543/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000963235 | - |
| dc.contributor.localauthor | 안병태 | - |
| dc.contributor.localauthor | Ahn, Byung-Tae | - |
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