학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.8, [ vi, 64 p. ]
미세리소그래피; 부분간섭성; 홉킨스 이론; 근접효과; 삼위상형 위상반전매스크; Tri-phase type PSM; Microlithography; Partial coherence; Hopkins theory; Proximity effect
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