실리콘의 식각 및 산화에 따른 격자 결함 발생과 열적 거동에 관한 투과 전자 현미경 연구A TEM study on the lattice defect generation and thermal behavior by silicon etching and oxidation
- Advisors
- 이정용researcher; Lee, Jeong-Yongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106620/325007 / 000943435
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ 107 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.