실리콘의 식각 및 산화에 따른 격자 결함 발생과 열적 거동에 관한 투과 전자 현미경 연구A TEM study on the lattice defect generation and thermal behavior by silicon etching and oxidation

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dc.contributor.advisor이정용-
dc.contributor.advisorLee, Jeong-Yong-
dc.contributor.author이주욱-
dc.contributor.authorLee, Ju-Wook-
dc.date.accessioned2011-12-15T01:30:07Z-
dc.date.available2011-12-15T01:30:07Z-
dc.date.issued1996-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106620&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50608-
dc.description학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ 107 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.title실리콘의 식각 및 산화에 따른 격자 결함 발생과 열적 거동에 관한 투과 전자 현미경 연구-
dc.title.alternativeA TEM study on the lattice defect generation and thermal behavior by silicon etching and oxidation-
dc.typeThesis(Master)-
dc.identifier.CNRN106620/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000943435-
dc.contributor.localauthor이정용-
dc.contributor.localauthorLee, Jeong-Yong-
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MS-Theses_Master(석사논문)
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