RFreactive sputtering법으로 제조한 탄성표면파 소자용 AlN:H 박막과 ZnO/AlN 이층박막의 특성에 관한 연구A study on the properties of AlN:H thin films and ZnO/AlN bilayered films prepared by RF reactive sputtering for the application of SAW devices
- Advisors
- 이재영; Lee, Jai-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 128166/325007 / 000935219
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.8, [ v, 133 p. ]
- Keywords
탄성표면파; 산화아연/질화알루미늄; 수소화된 질화알루미늄; 스퍼터링; Sputtering; SAW; ZnO/AlN; AlN:H
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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