RFreactive sputtering법으로 제조한 탄성표면파 소자용 AlN:H 박막과 ZnO/AlN 이층박막의 특성에 관한 연구A study on the properties of AlN:H thin films and ZnO/AlN bilayered films prepared by RF reactive sputtering for the application of SAW devices
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이재영 | - |
| dc.contributor.advisor | Lee, Jai-Young | - |
| dc.contributor.author | 용윤중 | - |
| dc.contributor.author | Yong, Yoon-Joong | - |
| dc.date.accessioned | 2011-12-15T01:03:04Z | - |
| dc.date.available | 2011-12-15T01:03:04Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128166&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50186 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.8, [ v, 133 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 탄성표면파 | - |
| dc.subject | 산화아연/질화알루미늄 | - |
| dc.subject | 수소화된 질화알루미늄 | - |
| dc.subject | 스퍼터링 | - |
| dc.subject | Sputtering | - |
| dc.subject | SAW | - |
| dc.subject | ZnO/AlN | - |
| dc.subject | AlN:H | - |
| dc.title | RFreactive sputtering법으로 제조한 탄성표면파 소자용 AlN:H 박막과 ZnO/AlN 이층박막의 특성에 관한 연구 | - |
| dc.title.alternative | A study on the properties of AlN:H thin films and ZnO/AlN bilayered films prepared by RF reactive sputtering for the application of SAW devices | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 128166/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000935219 | - |
| dc.contributor.localauthor | 용윤중 | - |
| dc.contributor.localauthor | Yong, Yoon-Joong | - |
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