Reactive sputtering법에 의한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성평가에 관한 연구A study on the preparations and characterizations of $Pb(Zr,Ti)O_3$ thin films by reactive sputtering
- Advisors
- 김호기researcher; Kim, Ho-Giresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 101893/325007 / 000895474
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1995.8, [ iv, 138 p. ]
- Keywords
상형성; PZT박막; 버퍼층; buffer layer; phase formation; PZT thin film
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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