Reactive sputtering법에 의한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성평가에 관한 연구A study on the preparations and characterizations of $Pb(Zr,Ti)O_3$ thin films by reactive sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김호기 | - |
| dc.contributor.advisor | Kim, Ho-Gi | - |
| dc.contributor.author | 조능호 | - |
| dc.contributor.author | Cho, Neung-Ho | - |
| dc.date.accessioned | 2011-12-15T01:02:09Z | - |
| dc.date.available | 2011-12-15T01:02:09Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=101893&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50131 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1995.8, [ iv, 138 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 상형성 | - |
| dc.subject | PZT박막 | - |
| dc.subject | 버퍼층 | - |
| dc.subject | buffer layer | - |
| dc.subject | phase formation | - |
| dc.subject | PZT thin film | - |
| dc.title | Reactive sputtering법에 의한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성평가에 관한 연구 | - |
| dc.title.alternative | A study on the preparations and characterizations of $Pb(Zr,Ti)O_3$ thin films by reactive sputtering | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 101893/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000895474 | - |
| dc.contributor.localauthor | 조능호 | - |
| dc.contributor.localauthor | Cho, Neung-Ho | - |
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- MS-Theses_Ph.D.(박사논문)
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