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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Ru 전구체의 열분해 메카니즘과 Ru 박막의 화학기상 증착 = Thermal decomposition mechanism of Ru precursor and chemical vapor deposition of Ru filmslink

최종완; Choi, Jong-Wan; 노광수; No, Kwang-Soo, 한국과학기술원, 2004

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