Ru 전구체의 열분해 메카니즘과 Ru 박막의 화학기상 증착 = Thermal decomposition mechanism of Ru precursor and chemical vapor deposition of Ru films

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 359
  • Download : 0
Advisors
노광수researcherNo, Kwang-Sooresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
237608/325007  / 000995383
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ viii, 117 p. ]

Keywords

단차 피복성; 메모리; 전극; 화학기상 증착법; 전구체; PRECURSOR; STEP COVERAGE; IR; RU; CVD

URI
http://hdl.handle.net/10203/49803
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237608&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0