Results 1-1 of 1 (Search time: 0.005 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
---|---|
Blanket 텅스텐 증착에 있어서 $WF_6$-$SiH_4$-$H_2$ 혼합기체와 TiN Glue Layer 간의 초기 반응에 관한 연구 = A study on the initial reactions of $WF_6$-$SiH_4$-$H_2$ gas mixture with TiN Glue Layer for Blanket tungsten depositionlink 이영종; Lee, Young-Jong; 천송순; Chun, Soung-Soon, 한국과학기술원, 1994 |
Discover