Blanket 텅스텐 증착에 있어서 $WF_6$-$SiH_4$-$H_2$ 혼합기체와 TiN Glue Layer 간의 초기 반응에 관한 연구 = A study on the initial reactions of $WF_6$-$SiH_4$-$H_2$ gas mixture with TiN Glue Layer for Blanket tungsten deposition

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Advisors
천송순Chun, Soung-Soon
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1994
Identifier
69693/325007 / 000855300
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 전자재료공학과, 1994.8, [ vi, 115 p. ]

Keywords

Chemical vapor deposition.

URI
http://hdl.handle.net/10203/49913
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69693&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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