Blanket 텅스텐 증착에 있어서 $WF_6$-$SiH_4$-$H_2$ 혼합기체와 TiN Glue Layer 간의 초기 반응에 관한 연구A study on the initial reactions of $WF_6$-$SiH_4$-$H_2$ gas mixture with TiN Glue Layer for Blanket tungsten deposition
- Advisors
- 천송순; Chun, Soung-Soon
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 69693/325007 / 000855300
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 전자재료공학과, 1994.8, [ vi, 115 p. ]
- Keywords
Chemical vapor deposition.
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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