학위논문(석사) - 한국과학기술원 : 나노과학기술학제전공, 2009.2, [ viii, 69 p. ]
patterning; trans-scalable; Microfabrication; Lithography; MEMS; 패터닝; 트랜스스케일; 마이크로패브리케이션; 리소그래피; 멤스
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