강성조절기능을 가진 정전용량형 실리콘 가속도계의 개발Development of capacitive type silicon accelerometer with stiffness-tuning capability
- Advisors
- 이종원researcher; Lee, Chong-Wonresearcher
- Description
- 한국과학기술원 : 기계공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 114496/325007 / 000953534
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학과, 1997.2, [ vii, 34 p. ]
- Keywords
실리콘 가속도계; 박막미세가공; 강성조절; Stiffness-tuning; Silicon accelerometer; Surface micromachining
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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