강성조절기능을 가진 정전용량형 실리콘 가속도계의 개발Development of capacitive type silicon accelerometer with stiffness-tuning capability
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이종원 | - |
| dc.contributor.advisor | Lee, Chong-Won | - |
| dc.contributor.author | 장현석 | - |
| dc.contributor.author | Jang, Hyun-Suk | - |
| dc.date.accessioned | 2011-12-14T06:59:55Z | - |
| dc.date.available | 2011-12-14T06:59:55Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114496&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/46661 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학과, 1997.2, [ vii, 34 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 실리콘 가속도계 | - |
| dc.subject | 박막미세가공 | - |
| dc.subject | 강성조절 | - |
| dc.subject | Stiffness-tuning | - |
| dc.subject | Silicon accelerometer | - |
| dc.subject | Surface micromachining | - |
| dc.title | 강성조절기능을 가진 정전용량형 실리콘 가속도계의 개발 | - |
| dc.title.alternative | Development of capacitive type silicon accelerometer with stiffness-tuning capability | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 114496/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학과, | - |
| dc.identifier.uid | 000953534 | - |
| dc.contributor.localauthor | 이종원 | - |
| dc.contributor.localauthor | Lee, Chong-Won | - |
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- ME-Theses_Master(석사논문)
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