학위논문(석사) - 한국과학기술원 : 기계공학전공, 2001.2, [ iv, 61 p. ]
회절격자; 변위측정; 광선편향법; 다자유도; 밀리구조물; milli-structure; diffraction grating; dispalcement measurement; OBDM; Multi-DOF
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