Browse "EE-Conference Papers(학술회의논문)" by Author N. Balasubramanian, N

Showing results 1 to 1 of 1

1
A novel approach for integration of dual metal gate process using ultra thin aluminum nitride buffer layer

Cho, Byung Jin; Park, CS; N. Balasubramanian, N; Kwong, DL, Symposium on VLSI Technology, pp.149 - 149, 2003-06-10

rss_1.0 rss_2.0 atom_1.0