DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Cho, Young-Ho | - |
dc.contributor.advisor | 조영호 | - |
dc.contributor.author | Lee, Ki-Bang | - |
dc.contributor.author | 이기방 | - |
dc.date.accessioned | 2011-12-14T05:17:38Z | - |
dc.date.available | 2011-12-14T05:17:38Z | - |
dc.date.issued | 2000 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158001&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/42989 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 기계공학전공, 2000.2, [ xix, 124 p. ] | - |
dc.description.abstract | This thesis investigates laterally-driven electrostatic attractive- and repulsive-force microactuators whose frequency and quality-factor can be adjusted electrically. In the attractive-force microactuators, a set of a triangular tuning-comb arrays with linearly varied finger length is used for frequency tuning. Quality-factors are adjusted by the electrostatic force, reducing the damping gap between two planar microstructures. The electrostatic repulsive-force microactuators are designed to use the lateral repulsive-force induced by asymmetry of in-plane electric field. The resonanat frequency and quality-factor of the repulsive-force microactuator have been adjusted by the change of DC bias voltage. The attractive-force and repulsive-force microactuators are fabricated by a 4-mask surface-micromachining process. Actuation and tuning forces of each microactuator are characterized by analytical and numerical simulations. The resonant frequency and quality-factor of each of microactuators are measured and compared with the theoretical values. A 3.3% reduction of the resonant frequency of the attractive-force microactuator was achieved from the initial resonant frequency of 2.42kHz for the tuning voltage increase of 20V, resulting in the equivalent stiffness modification rate of -$4.9\times 10^{-5}N/m/V^2$. The resonant frequency of the repulsive-force microactuator were increased from 11.7kHz to 12.7kHz for the DC bias voltage increase of 80V from 60V, resulting in the frequency tuning sensitivity of 0.11%/V. The quality-factor of the attractive-force microactuator can be reduced at the rate of 62/V in the control voltage range of 1.75~2.25V; thereby demonstrating the maximum 50% reduction of quality factor for the electrostatic control voltage in the range of 1.75~2.25V. The measured quality-factor of the repulsive-force microactuator varies from 12 to 13 for the DC bias voltage range of 60~140V. It is concluded that the resonant frequency and quality-factor of... | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Frequency tuning | - |
dc.subject | Microsensor | - |
dc.subject | Microactuator | - |
dc.subject | Micromachine | - |
dc.subject | MEMS | - |
dc.subject | Quality-factor control | - |
dc.subject | 감쇠계수 조정 | - |
dc.subject | 주사수 조정 | - |
dc.subject | 마이크로센서 | - |
dc.subject | 마이크로액츄에이터 | - |
dc.subject | 마이크로머신 | - |
dc.subject | 멤즈 | - |
dc.title | Laterally-driven electrostatic attractive- and repulsive-force microactuators for frequency tuning and quality-factor control | - |
dc.title.alternative | 주파수 및 감쇠계수 조정이 가능한 정전인력 및 정전반발력 수평구동형 마이크로액츄에이터 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 158001/325007 | - |
dc.description.department | 한국과학기술원 : 기계공학전공, | - |
dc.identifier.uid | 000935244 | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.localauthor | 조영호 | - |
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