We consider the photolithography process for memory chips fabrication. Each wafer is processed at the same machine each time it reenters the process. A stepper in the process requires delicate setup for processing of each circuit layer. We investigate the batch sizes in the steppers. To do this, we use a simplified simulation model that aggregates the other fabrication processes into a single queueing station. We also investigate input regulation policies for the photolithography process. Relationships between performance measures, batch sizes, and input policies are discussed using simulation experiments.