Reactive sputtering 기법을 이용한 AIN 박막 증착과 film bulk acoustic resonator 제작Deposition of AIN by reactive sputtering and fabrication of film bulk acoustic resonator
- Advisors
- 홍성철researcher; Hong, Song-Cheolresearcher
- Description
- 한국과학기술원 : 전기 및 전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 69569/325007 / 000923502
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1994.2, [ ii, 66 p. ]
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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