학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2024.2,[iii, 34 p. :]
정전용량형 미세가공 초음파 트랜스듀서 (CMUT)▼aMEMS▼a저전압▼a초음파 이미징▼a자기 정렬▼a고유전율 유전체; Capacitive Micromachined Ultrasonic Transducer (CMUT)▼aMEMS▼aUltrasonic imaging▼aSelf-aligned▼aHigh-k dielectric
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