학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2023.8,[iii, 25 p. :]
유연 온도센서▼a저온 플라즈마▼a고민감도▼a높은 균일성; Flexible temperature sensor▼aLow-temperature plasma▼aHigh sensitivity▼aHigh uniformity
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