DSpace at KOASAS: Wafer-Scale CMOS-Compatible Electro-Thermally Actuated Nanomechanical Non-Volatile Switch with Out-of-Plane Electrode Configuration

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Journal Papers(저널논문)

Wafer-Scale CMOS-Compatible Electro-Thermally Actuated Nanomechanical Non-Volatile Switch with Out-of-Plane Electrode Configuration

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Lee, Yong-Bok / Choi, Pan-Hyu / Kang, Min-Ho / Kim Su-Hyun / Lee, Seung-Jun / KIm, Tae-Soo / Lee, So-Young / Yoon, Jun-Bo researcher

Publisher: Wiley

Issue Date: 2024-04

Language: English

Citation: Advanced Electron Materials

URI: http://hdl.handle.net/10203/320318

Appears in Collection: EE-Journal Papers(저널논문)

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Wafer-Scale CMOS-Compatible Electro-Thermally Actuated Nanomechanical Non-Volatile Switch with Out-of-Plane Electrode Configuration

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