반도체 웨이퍼 가공 공정에서 흐름시간의 평균과 표준편차를 제어하기 위한 실시간 스케쥴링 방법A real-time scheduling methodology to control the mean and the standard deviation of the flow time in semi
- Publisher
- 대한기계학회
- Issue Date
- 1999-01
- Language
- Korean
- Citation
대한기계학회논문집 A, v.23, no.12, pp.2120 - 2131
- ISSN
- 1226-4873
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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