Silicon wafer thickness measurement based on optical third-harmonic generation with femtosecond laser pulses
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, In Jae | ko |
| dc.contributor.author | Kim, Dae Hee | ko |
| dc.contributor.author | Hahm, Ji Won | ko |
| dc.contributor.author | KIM, Young-Jin | ko |
| dc.contributor.author | Kim, Seung-Woo | ko |
| dc.date.accessioned | 2023-12-18T08:02:01Z | - |
| dc.date.available | 2023-12-18T08:02:01Z | - |
| dc.date.created | 2023-11-24 | - |
| dc.date.issued | 2023-04-21 | - |
| dc.identifier.citation | The 12th Advanced Lasers and Photon Sources | - |
| dc.identifier.uri | http://hdl.handle.net/10203/316648 | - |
| dc.language | English | - |
| dc.publisher | ALPS 2023 | - |
| dc.title | Silicon wafer thickness measurement based on optical third-harmonic generation with femtosecond laser pulses | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | The 12th Advanced Lasers and Photon Sources | - |
| dc.identifier.conferencecountry | JA | - |
| dc.identifier.conferencelocation | PACIFICO Yokohama | - |
| dc.contributor.localauthor | KIM, Young-Jin | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Lee, In Jae | - |
| dc.contributor.nonIdAuthor | Kim, Dae Hee | - |
| dc.contributor.nonIdAuthor | Hahm, Ji Won | - |
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