Silicon Wafer’s Non-destructive Measurement System based on Optical Third Harmonic Generation (THG)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, In Jae | ko |
| dc.contributor.author | Kim, Dae Hee | ko |
| dc.contributor.author | Hahm, Jiwon | ko |
| dc.contributor.author | KIM, Young-Jin | ko |
| dc.contributor.author | Kim, Seung-Woo | ko |
| dc.date.accessioned | 2023-12-13T06:01:21Z | - |
| dc.date.available | 2023-12-13T06:01:21Z | - |
| dc.date.created | 2023-11-24 | - |
| dc.date.issued | 2023-05-16 | - |
| dc.identifier.citation | The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2023) | - |
| dc.identifier.uri | http://hdl.handle.net/10203/316381 | - |
| dc.language | English | - |
| dc.publisher | IEEE-NEMS(nano/micro engineering molecular system) | - |
| dc.title | Silicon Wafer’s Non-destructive Measurement System based on Optical Third Harmonic Generation (THG) | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2023) | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | Ramada Plaza Hotel Jeju | - |
| dc.contributor.localauthor | KIM, Young-Jin | - |
| dc.contributor.nonIdAuthor | Lee, In Jae | - |
| dc.contributor.nonIdAuthor | Kim, Dae Hee | - |
| dc.contributor.nonIdAuthor | Hahm, Jiwon | - |
| dc.contributor.nonIdAuthor | Kim, Seung-Woo | - |
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