Silicon Wafer’s Non-destructive Measurement and Interface Inspection System based on Optical Third Harmonic Generation
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, In Jae | ko |
| dc.contributor.author | Kim, Dae Hee | ko |
| dc.contributor.author | Hahm, Jiwon | ko |
| dc.contributor.author | Yoo, Hongki | ko |
| dc.contributor.author | Kim, Seung-Woo | ko |
| dc.contributor.author | KIM, Young-Jin | ko |
| dc.date.accessioned | 2023-12-13T06:01:15Z | - |
| dc.date.available | 2023-12-13T06:01:15Z | - |
| dc.date.created | 2023-11-24 | - |
| dc.date.issued | 2023-07-12 | - |
| dc.identifier.citation | 1st International Symposium on Micro and Nano Manufacturing, ISMNM 2023 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/316380 | - |
| dc.language | English | - |
| dc.publisher | ISMNM | - |
| dc.title | Silicon Wafer’s Non-destructive Measurement and Interface Inspection System based on Optical Third Harmonic Generation | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 1st International Symposium on Micro and Nano Manufacturing, ISMNM 2023 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | St. John's Hotel, Gangneung | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.localauthor | KIM, Young-Jin | - |
| dc.contributor.nonIdAuthor | Lee, In Jae | - |
| dc.contributor.nonIdAuthor | Kim, Dae Hee | - |
| dc.contributor.nonIdAuthor | Hahm, Jiwon | - |
| dc.contributor.nonIdAuthor | Yoo, Hongki | - |
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