DSpace at KOASAS: Mechanisms of surface topographic developments by reactive ion beam sputtering : effects of the chemical states of surface and interface

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College of Natural Sciences(자연과학대학)Dept. of Chemistry(화학과)CH-Theses_Ph.D.(박사논문)

Mechanisms of surface topographic developments by reactive ion beam sputtering : effects of the chemical states of surface and interface반응성 이온빔 스퍼터링에 의한 표면 미세 구조 성장의 메커니즘에 관한 연구 : 표면 및 계면 화학 상태의 영향

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Kim, Kyung-Joong / 김경중

Advisors: Jung, Kyung-Hoon; 정경훈

Description: 한국과학기술원 : 화학과,

Publisher: 한국과학기술원

Issue Date: 1998

Identifier: 135115/325007 / 000945801

Language: eng

Description: 학위논문(박사) - 한국과학기술원 : 화학과, 1998.2, [ xi, 139 p. ]

Keywords: Facet; Blister; Surface topograpy; Depth profiling; SIMS; Surface diffusion; 표면확산; 패셋; 수포; 표면미세구조; 깊이분포도; 이차이온질량분석법

URI: http://hdl.handle.net/10203/31481

Link: http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=135115&flag=dissertation

Appears in Collection: CH-Theses_Ph.D.(박사논문)

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Mechanisms of surface topographic developments by reactive ion beam sputtering : effects of the chemical states of surface and interface반응성 이온빔 스퍼터링에 의한 표면 미세 구조 성장의 메커니즘에 관한 연구 : 표면 및 계면 화학 상태의 영향

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