Snapshot conical diffraction phase image measurement in angle-resolved microellipsometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Daesuk | ko |
| dc.contributor.author | Jin, Moonseob | ko |
| dc.contributor.author | Lee, Hyunchul | ko |
| dc.contributor.author | Kim, Soohyun | ko |
| dc.contributor.author | Magnusson, Robert | ko |
| dc.date.accessioned | 2023-10-24T12:01:36Z | - |
| dc.date.available | 2023-10-24T12:01:36Z | - |
| dc.date.created | 2023-10-24 | - |
| dc.date.issued | 2013-06 | - |
| dc.identifier.citation | Computational Optical Sensing and Imaging, COSI 2013 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/313753 | - |
| dc.description.abstract | We describe a snapshot conical diffraction phase image measurement method in angle resolved microelliposometry employing an objective lens for incidence angle modulation. We expect the proposed scheme can be extended to digital holography based conical diffraction phase image extraction field. | - |
| dc.language | English | - |
| dc.publisher | Optical Society of America (OSA) | - |
| dc.title | Snapshot conical diffraction phase image measurement in angle-resolved microellipsometry | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-85087604944 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Computational Optical Sensing and Imaging, COSI 2013 | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Arlington, VA | - |
| dc.identifier.doi | 10.1364/cosi.2013.ctu3c.5 | - |
| dc.contributor.localauthor | Kim, Soohyun | - |
| dc.contributor.nonIdAuthor | Kim, Daesuk | - |
| dc.contributor.nonIdAuthor | Jin, Moonseob | - |
| dc.contributor.nonIdAuthor | Lee, Hyunchul | - |
| dc.contributor.nonIdAuthor | Magnusson, Robert | - |
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