Reversible nano-lithography for commercial approaches

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 62
  • Download : 0
The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro-or nano-scale sensors and actuators.
Publisher
SPIE
Issue Date
2016-02
Language
English
Citation

Alternative Lithographic Technologies VIII

ISSN
0277-786X
DOI
10.1117/12.2205065
URI
http://hdl.handle.net/10203/313009
Appears in Collection
RIMS Conference Papers
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0