DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Jae Hong | ko |
dc.contributor.author | Jang, Hyun Ik | ko |
dc.contributor.author | Kim, Woo Choong | ko |
dc.contributor.author | Yun, Hae S | ko |
dc.contributor.author | Park, Jun Yong | ko |
dc.contributor.author | Jeon, Seok Woo | ko |
dc.contributor.author | Kim, Hee Yeoun | ko |
dc.contributor.author | Ahn, Chi Won | ko |
dc.date.accessioned | 2023-10-05T05:00:56Z | - |
dc.date.available | 2023-10-05T05:00:56Z | - |
dc.date.created | 2023-10-05 | - |
dc.date.issued | 2016-02 | - |
dc.identifier.citation | Alternative Lithographic Technologies VIII | - |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | http://hdl.handle.net/10203/313009 | - |
dc.description.abstract | The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro-or nano-scale sensors and actuators. | - |
dc.language | English | - |
dc.publisher | SPIE | - |
dc.title | Reversible nano-lithography for commercial approaches | - |
dc.type | Conference | - |
dc.identifier.wosid | 000381728400048 | - |
dc.identifier.scopusid | 2-s2.0-84981516858 | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | Alternative Lithographic Technologies VIII | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | San Jose, CA | - |
dc.identifier.doi | 10.1117/12.2205065 | - |
dc.contributor.nonIdAuthor | Park, Jae Hong | - |
dc.contributor.nonIdAuthor | Jang, Hyun Ik | - |
dc.contributor.nonIdAuthor | Kim, Woo Choong | - |
dc.contributor.nonIdAuthor | Yun, Hae S | - |
dc.contributor.nonIdAuthor | Park, Jun Yong | - |
dc.contributor.nonIdAuthor | Jeon, Seok Woo | - |
dc.contributor.nonIdAuthor | Kim, Hee Yeoun | - |
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