Reversible nano-lithography for commercial approaches

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dc.contributor.authorPark, Jae Hongko
dc.contributor.authorJang, Hyun Ikko
dc.contributor.authorKim, Woo Choongko
dc.contributor.authorYun, Hae Sko
dc.contributor.authorPark, Jun Yongko
dc.contributor.authorJeon, Seok Wooko
dc.contributor.authorKim, Hee Yeounko
dc.contributor.authorAhn, Chi Wonko
dc.date.accessioned2023-10-05T05:00:56Z-
dc.date.available2023-10-05T05:00:56Z-
dc.date.created2023-10-05-
dc.date.issued2016-02-
dc.identifier.citationAlternative Lithographic Technologies VIII-
dc.identifier.issn0277-786X-
dc.identifier.urihttp://hdl.handle.net/10203/313009-
dc.description.abstractThe methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro-or nano-scale sensors and actuators.-
dc.languageEnglish-
dc.publisherSPIE-
dc.titleReversible nano-lithography for commercial approaches-
dc.typeConference-
dc.identifier.wosid000381728400048-
dc.identifier.scopusid2-s2.0-84981516858-
dc.type.rimsCONF-
dc.citation.publicationnameAlternative Lithographic Technologies VIII-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationSan Jose, CA-
dc.identifier.doi10.1117/12.2205065-
dc.contributor.nonIdAuthorPark, Jae Hong-
dc.contributor.nonIdAuthorJang, Hyun Ik-
dc.contributor.nonIdAuthorKim, Woo Choong-
dc.contributor.nonIdAuthorYun, Hae S-
dc.contributor.nonIdAuthorPark, Jun Yong-
dc.contributor.nonIdAuthorJeon, Seok Woo-
dc.contributor.nonIdAuthorKim, Hee Yeoun-
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