학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2023.2,[iv, 37 p. :]
플라즈마 유도 열화▼a안테나 비율▼a3D 낸드▼a전기적 줄 발열▼a저주파 측정 분석; Plasma induced damage▼aAntenna ratio▼a3D NAND▼aElectro-thermal annealing▼aLow-frequency noise
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