MEMS-based indirect time-of-flight scanning LiDAR with parallel-phase demodulation and multipath interference suppression

Abstract

This paper suggests a MEMS-based indirect time-of-flight (ToF) scanning light detection and ranging (LiDAR) system with parallel-phase demodulation. Based on the parallel-phase demodulation which extremely reduces the integration time maintaining high demodulation contrast, the proposed LiDAR can acquire accurate depth images with mean absolute error (MAE) about 1.5 cm at the distance of 1.85 m using 20 mW laser power. Meanwhile, MAE due to multipath interference (MPI) of the proposed LiDAR originally about 1.5 cm could be further reduced to less than 8 mm using support vector regression (SVR).