Fabrication and Characterization of Fixed-Nano-Abrasive Polishing Pads using Vertically Aligned Carbon Nanotubes
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kang, Sukkyung | ko |
| dc.contributor.author | Kim, Sanha | ko |
| dc.contributor.author | Jeong, Ji-hun | ko |
| dc.date.accessioned | 2023-01-31T07:03:00Z | - |
| dc.date.available | 2023-01-31T07:03:00Z | - |
| dc.date.created | 2023-01-10 | - |
| dc.date.issued | 2022-10-27 | - |
| dc.identifier.citation | International Conference on Planarization Technology, ICPT 2022 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/304841 | - |
| dc.language | English | - |
| dc.publisher | International Conference on Planarization Technology (ICPT) | - |
| dc.title | Fabrication and Characterization of Fixed-Nano-Abrasive Polishing Pads using Vertically Aligned Carbon Nanotubes | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International Conference on Planarization Technology, ICPT 2022 | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | The Benson Hotel, Portland, OR | - |
| dc.contributor.localauthor | Kim, Sanha | - |
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