DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Chulhan | ko |
dc.contributor.author | Yu, Tae-Sun | ko |
dc.contributor.author | Lee, Tae-Eog | ko |
dc.date.accessioned | 2022-07-27T01:01:00Z | - |
dc.date.available | 2022-07-27T01:01:00Z | - |
dc.date.created | 2022-01-04 | - |
dc.date.created | 2022-01-04 | - |
dc.date.created | 2022-01-04 | - |
dc.date.issued | 2022-07 | - |
dc.identifier.citation | IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.3, pp.2008 - 2015 | - |
dc.identifier.issn | 1545-5955 | - |
dc.identifier.uri | http://hdl.handle.net/10203/297607 | - |
dc.description.abstract | In this research, we examine feedback control-based cluster tool scheduling methods to maintain consistent wafer sojourn times when a tool is subject to random disruptive events. In our previous work, we proposed a feedback control design that regulates wafer sojourn times not to exceed the upper limits on wafer delays in a deterministic processing environment. Although such a feedback controller may ensure that wafer delay upper limits are always satisfied, it does not necessarily guarantee that the tool always restores its initial tool state after the occurrence of time disruptive events. This article thus further examines under which conditions a feedback controller enforces the wafer sojourn times to be stabilized in a stochastic processing environment with unexpected random time disruptions. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | Feedback Control of Cluster Tools: Stability Against Random Time Disruptions | - |
dc.type | Article | - |
dc.identifier.wosid | 000732404400001 | - |
dc.identifier.scopusid | 2-s2.0-85104260608 | - |
dc.type.rims | ART | - |
dc.citation.volume | 19 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 2008 | - |
dc.citation.endingpage | 2015 | - |
dc.citation.publicationname | IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING | - |
dc.identifier.doi | 10.1109/TASE.2021.3070346 | - |
dc.contributor.localauthor | Lee, Tae-Eog | - |
dc.contributor.nonIdAuthor | Kim, Chulhan | - |
dc.contributor.nonIdAuthor | Yu, Tae-Sun | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Tools | - |
dc.subject.keywordAuthor | Schedules | - |
dc.subject.keywordAuthor | Delays | - |
dc.subject.keywordAuthor | Job shop scheduling | - |
dc.subject.keywordAuthor | Feedback control | - |
dc.subject.keywordAuthor | Algebra | - |
dc.subject.keywordAuthor | Petri nets | - |
dc.subject.keywordAuthor | Cluster tool | - |
dc.subject.keywordAuthor | feedback control | - |
dc.subject.keywordAuthor | random time disruption | - |
dc.subject.keywordAuthor | stability | - |
dc.subject.keywordPlus | MULTIPLE WAFER TYPES | - |
dc.subject.keywordPlus | PROCESS-MODULE | - |
dc.subject.keywordPlus | EVENT GRAPHS | - |
dc.subject.keywordPlus | CONSTRAINTS | - |
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