LSMCVD 공정으로 제조한 BST 박막의 저온 결정화 및 박막에 대한 열처리 조건과 용매의 영향Crystallization at low temperature of BST thin films prepared by LSMCVD, and effects of heat treatment and solvent on the films
- Description
- 한국과학기술원 : 화학공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 133653/325007 / 000963267
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 화학공학과, 1998.2, [ viii, 76 p. ]
- Keywords
결정화; dpm; LSMCVD; BST; Cristallization; dpm; 액적화학증착법; 티탄산바륨스트론튬
- Appears in Collection
- CBE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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